Delabie, AnneliesAnneliesDelabieCaymax, MattyMattyCaymaxBrijs, BertBertBrijsBrunco, DavidDavidBruncoConard, ThierryThierryConardSleeckx, ErikErikSleeckxRagnarsson, Lars-AkeLars-AkeRagnarssonVan Elshocht, SvenSvenVan ElshochtDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10365Studies and optimization of HfO2 grown by HfCl4/H2O atomic layer depositionMeeting abstract