Claessens, NielsNielsClaessensDelabie, AnneliesAnneliesDelabieVantomme, AndreAndreVantommeVandervorst, WilfriedWilfriedVandervorstMeersschaut, JohanJohanMeersschaut2023-10-202023-10-2020230168-583XWOS:001012739500001https://imec-publications.be/handle/20.500.12860/42840Probing the spatial dimensions of nanoscale patterns with Rutherford backscattering spectrometryJournal article10.1016/j.nimb.2023.04.036WOS:001012739500001ION-BEAM ANALYSISAREA-SELECTIVE DEPOSITIONCOMPUTER-SIMULATIONTHIN-FILMSSPECTRARBSNANOSTRUCTURESSOFTWAREPROGRAM3D