SrTiOx for sub-20 nm DRAM technology nodes - characterization and modeling

Kaczer, BenBenKaczerLarcher, LucaLucaLarcherVandelli, LucaLucaVandelliReisinger, HansHansReisingerPopovici, Mihaela IoanaMihaela IoanaPopoviciClima, SergiuSergiuClimaJi, ZhigangZhigangJiJoshi, SaumyaSaumyaJoshiSwerts, JohanJohanSwertsRedolfi, AugustoAugustoRedolfiAfanasiev, ValeriValeriAfanasievJurczak, GosiaGosiaJurczak2021-10-222021-10-2220150167-9317https://imec-publications.be/handle/20.500.12860/25448SrTiOx for sub-20 nm DRAM technology nodes - characterization and modelingJournal articlehttp://www.sciencedirect.com/science/article/pii/S0167931715002956