Beyne, SofieSofieBeyneVarela Pedreira, OlallaOlallaVarela PedreiraOprins, HermanHermanOprinsDe Wolf, IngridIngridDe WolfTokei, ZsoltZsoltTokeiCroes, KristofKristofCroes2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32540Electromigration activation energies in ruthenium interconnectsProceedings paperhttps://iitc-conference.org/2019-iitc-mam-program/