Selective single-wafer wet etching of Hf-based layers

Snow, JimJimSnowKraus, HaraldHaraldKrausKovacs, FrediFrediKovacsClaes, MartineMartineClaesParaschiv, VasileVasileParaschivVos, RitaRitaVosMertens, PaulPaulMertensDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsArcher, LeoLeoArcher2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11249Selective single-wafer wet etching of Hf-based layersJournal article