Probability prediction of EUV process failure due to resist-exposure stochastic: applications of Gaussian random fields excursions and Rice's formula

Latypov, AzatAzatLatypovKhaira, DamonDamonKhairaFenger, GermainGermainFengerSturtevant, JohnJohnSturtevantWei, Chih-IChih-IWeiDe Bisschop, PeterPeterDe Bisschop2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/35441Probability prediction of EUV process failure due to resist-exposure stochastic: applications of Gaussian random fields excursions and Rice's formulaProceedings paperhttps://doi.org/10.1117/12.2551965