On the apparent non-Arrhenius temperature dependence of charge-trapping in IIIV/high-k MOS stack

Putcha, VamsiVamsiPutchaFranco, JacopoJacopoFrancoVais, AbhitoshAbhitoshVaisSioncke, SonjaSonjaSionckeKaczer, BenBenKaczerLinten, DimitriDimitriLintenGroeseneken, GuidoGuidoGroeseneken2021-10-262021-10-2620180018-9383https://imec-publications.be/handle/20.500.12860/31572On the apparent non-Arrhenius temperature dependence of charge-trapping in IIIV/high-k MOS stackJournal articlehttps://ieeexplore.ieee.org/document/8412232