Characterization and Advanced Modeling of Dielectric Defects in Low-Thermal Budget RMG MOSFETs Using 1/f Noise Analysis

Asanovski, R.R.AsanovskiArimura, HiroakiHiroakiArimurade Marneffe, Jean-FrancoisJean-Francoisde MarneffePalestri, P.P.PalestriHoriguchi, NaotoNaotoHoriguchiKaczer, BenBenKaczerSelmi, L.L.SelmiFranco, JacopoJacopoFranco2025-01-132024-02-062025-01-1320240018-9383WOS:001152073600001https://imec-publications.be/handle/20.500.12860/43498Characterization and Advanced Modeling of Dielectric Defects in Low-Thermal Budget RMG MOSFETs Using 1/f Noise AnalysisJournal article10.1109/TED.2024.3351598WOS:001152073600001LOW-FREQUENCY NOISE