Wafer level integration of plasmonic nanopore arrays into 200mm CMOS fab environment

Malachowski, KarlKarlMalachowskiVerbeeck, RitaRitaVerbeeckDupont, TaniaTaniaDupontChen, ChangChangChenStakenborg, TimTimStakenborgLi, YiYiLiSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanVan Dorpe, PolPolVan Dorpe2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21085Wafer level integration of plasmonic nanopore arrays into 200mm CMOS fab environmentMeeting abstract