D'Urzo, LuciaLuciaD'UrzoUmeda, ToruToruUmedaMizuno, TakehitoTakehitoMizunoHattori, AtsushiAtsushiHattoriSingh, AmarnauthAmarnauthSinghBeera, RajanRajanBeeraFoubert, PhilippePhilippeFoubertDrent, WautWautDrent2023-01-192022-09-082023-01-192021978-1-5106-4057-30277-786XWOS:000844537900010https://imec-publications.be/handle/20.500.12860/40391High performance filtration for bulk materials: a novel HDPE membrane filter designed for EUV LithographyProceedings paper10.1117/12.2584064978-1-5106-4058-0WOS:000844537900010