Heterogeneously integrated InGaAsSb detectors on SOI waveguide circuits for short-wave infrared applications

Hattasan, NannichaNannichaHattasanGassenq, AlbanAlbanGassenqKuyken, BartBartKuykenCerutti, L.L.CeruttiRodriguez, J.B.J.B.RodriguezTournie, E.E.TournieVan Thourhout, DriesDriesVan ThourhoutRoelkens, GuntherGuntherRoelkens2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19053Heterogeneously integrated InGaAsSb detectors on SOI waveguide circuits for short-wave infrared applicationsProceedings paper