Bekaert, JoostJoostBekaertLaenens, BartBartLaenensVerhaegen, StafStafVerhaegenVan Look, LieveLieveVan LookTrivkovic, DarkoDarkoTrivkovicLazzarino, FredericFredericLazzarinoVandenberghe, GeertGeertVandenbergheVan Adrichem, PaulPaulVan AdrichemSocha, RobertRobertSochaBaron, S.S.BaronTsai, M.-C.M.-C.TsaiNing, K.K.NingHsu, S.S.HsuLiu, H.Y.H.Y.LiuMulder, M.M.MulderBouma, A.A.Boumavan der Heijden, E.E.van der HeijdenMouraille, O.O.MourailleSchreel, K.K.SchreelFinders, JoJoFindersDusa, MirceaMirceaDusaZimmerman, J.J.ZimmermanGraeupner, PaulPaulGraeupnerNeumann, J.T.J.T.NeumannHennerkes, C.C.Hennerkes2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16724Freeform illumination sources: an experimental study of source-mask optimization for 22nm SRAM cellsProceedings paper