Ultra low-k dielectrics damage under VUV and EUV radiation

Zyryanov, S.S.ZyryanovBraginsky, O.O.BraginskyKovaev, A.A.KovaevLopaev, D.D.LopaevMankelevich, Y.Y.MankelevichRakhimova, T.T.RakhimovaRakhimov, A.A.RakhimovVasilieva, A.A.VasilievaBaklanov, MikhaïlMikhaïlBaklanov2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21940Ultra low-k dielectrics damage under VUV and EUV radiationMeeting abstract