Anisotropic etching in (3 1 1) Si to fabricate sharp resorbable polymer microneedles carrying neural electrode arrays

Ceyssens, FrederikFrederikCeyssensWelkenhuysen, MarleenMarleenWelkenhuysenPuers, BobBobPuers2021-10-272021-10-2720190960-1317https://imec-publications.be/handle/20.500.12860/32675Anisotropic etching in (3 1 1) Si to fabricate sharp resorbable polymer microneedles carrying neural electrode arraysJournal articlehttps://doi.org/10.1088/1361-6439/aaf43a