Formation of self-organized nanodots on GaN surface by Ar-ion implantation

Som, TapobrataTapobrataSomPereira, L.L.PereiraSkeren, T.T.SkerenDemeulemeester, J.J.DemeulemeesterFranquet, AlexisAlexisFranquetTemst, K.K.TemstVantomme, AndreAndreVantomme2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18010Formation of self-organized nanodots on GaN surface by Ar-ion implantationMeeting abstract