Akiki, EliasEliasAkikiVerstuyft, MattiMattiVerstuyftKuyken, BartBartKuykenWalter, BenjaminBenjaminWalterFaucher, MarcMarcFaucherLampin, Jean-FrancoisJean-FrancoisLampinDucournau, GuillaumeGuillaumeDucournauVanwolleghem, MathiasMathiasVanwolleghem2022-02-252022-02-2520212156-342XWOS:000606582500004https://imec-publications.be/handle/20.500.12860/39138High-Q THz Photonic Crystal Cavity on a Low-Loss Suspended Silicon PlatformJournal article10.1109/TTHZ.2020.3019928WOS:000606582500004