Carter, RichardRichardCarterTsai, WilmanWilmanTsaiYoung, EdwardEdwardYoungMaes, JanJanMaesChen, P.J.P.J.ChenDelabie, AnneliesAnneliesDelabieZhao, ChaoChaoZhaoDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7287Effect of Al-content and post deposition annealing on the electrical properties of ultra-thin HfAlxOy layersProceedings paper