Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology

Bogaerts, WimWimBogaertsBaets, RoelRoelBaetsDumon, PieterPieterDumonWiaux, VincentVincentWiauxBeckx, StephanStephanBeckxTaillaert, DirkDirkTaillaertLuyssaert, BertBertLuyssaertVan Campenhout, JanJanVan CampenhoutBienstman, PeterPeterBienstmanVan Thourhout, DriesDriesVan Thourhout2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10117Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technologyJournal article