Surdeanu, RaduRaduSurdeanuLindsay, RichardRichardLindsaySeveri, SimoneSimoneSeveriSatta, AlessandraAlessandraSattaPawlak, BartekBartekPawlakLauwers, AnneAnneLauwersDachs, C.J.J.C.J.J.DachsHenson, KirklenKirklenHensonMcCoy, S.S.McCoyGelpey, J.C.J.C.Gelpey2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9654Integrating diffusionless anneals into advanced CMOS technologiesProceedings paper