Stochastic modeling of polyethylene glycol as a suppressor in copper electroplating

Yang, LiuLiuYangRadisic, AlexAlexRadisicDeconinck, JohanJohanDeconinckVereecken, PhilippePhilippeVereecken2021-10-222021-10-2220140013-4651https://imec-publications.be/handle/20.500.12860/24860Stochastic modeling of polyethylene glycol as a suppressor in copper electroplatingJournal articlehttp://jes.ecsdl.org/content/161/5/D269.full