Hellings, GeertGeertHellingsRosseel, ErikErikRosseelClarysse, TrudoTrudoClaryssePetersen, Dirch HjorthDirch HjorthPetersenHansen, OleOleHansenNielsen, Peter FolmerPeter FolmerNielsenSimoen, EddyEddySimoenEneman, GeertGeertEnemanDe Jaeger, BriceBriceDe JaegerHoffmann, Thomas Y.Thomas Y.HoffmannDe Meyer, KristinKristinDe MeyerVandervorst, WilfriedWilfriedVandervorst2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17245Systematic study of shallow junction formation on Germanium substratesMeeting abstract