Detection of failure sites by focused ion beam and nano-probing in the interconnect of three-dimensional stacked circuit structures

Yang, YuYuYangBender, HugoHugoBenderArstila, KaiKaiArstilaSwinnen, BartBartSwinnenVerlinden, BertBertVerlindenDe Wolf, IngridIngridDe Wolf2021-10-172021-10-1720080026-2714https://imec-publications.be/handle/20.500.12860/14811Detection of failure sites by focused ion beam and nano-probing in the interconnect of three-dimensional stacked circuit structuresJournal articlehttp://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6V47-4T2S02Y-5&_user=799533&_rdoc=1&_fmt=&_orig=search&_sort=d&view=c&