Hardy, AnAnHardyVan Elshocht, SvenSvenVan ElshochtD'Haen, JanJanD'HaenDe Gendt, StefanStefanDe GendtVan Bael, MarliesMarliesVan BaelHeyns, MarcMarcHeynsD'Olieslaeger, MarcMarcD'OlieslaegerMullens, JulesJulesMullens2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13841In pursuit of "super"high-k ternary oxides: aqueous CSD and material propertiesProceedings paper