Epitaxial Ge-on-Nothing and Epitaxial Ge on Si-on-Nothing as Virtual Substrates for 3D Device Stacking Technologies

Loo, RogerRogerLooPorret, ClémentClémentPorretHan, HanHanHanSrinivasan, AshwynAshwynSrinivasanVecchio, EmmaEmmaVecchioDepauw, ValerieValerieDepauw2022-03-022022-03-0220212162-8769WOS:000685548500001https://imec-publications.be/handle/20.500.12860/39207Epitaxial Ge-on-Nothing and Epitaxial Ge on Si-on-Nothing as Virtual Substrates for 3D Device Stacking TechnologiesJournal article10.1149/2162-8777/ac1a0bWOS:000685548500001GERMANIUMCOALESCENCELAYERS