Dendooven, JolienJolienDendoovenDevloo-Casier, KilianKilianDevloo-CasierLevrau, ElisabethElisabethLevrauVan Hove, RobbertRobbertVan HovePulinthanathu Sree, SreeprasanthSreeprasanthPulinthanathu SreeBaklanov, MikhaïlMikhaïlBaklanovMartens, JohanJohanMartensDetavernier, ChristopheChristopheDetavernier2021-10-202021-10-2020120743-7463https://imec-publications.be/handle/20.500.12860/20585In situ monitoring of atomic layer deposition in nanoporous thin films using ellipsometric porosimetryJournal article