Non-destructive characterization of activated ion-implanted doping profiles based on photomodulated optical reflectance

Bogdanowicz, JanuszJanuszBogdanowiczClarysse, TrudoTrudoClarysseMoussa, AlainAlainMoussaMody, JayJayModyEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorstRosseel, ErikErikRosseel2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18597Non-destructive characterization of activated ion-implanted doping profiles based on photomodulated optical reflectanceProceedings paper