Increased carbon nanotube density after catalyst generation from cobalt disilicide using a cyclic reactive ion etching approach

Xie, RongsiRongsiXieZhang, CanCanZhangChen, BinganBinganChenvan der Veen, MarleenMarleenvan der VeenZhong, GuofangGuofangZhongRobertson, johnjohnRobertson2021-10-222021-10-2220140021-8979https://imec-publications.be/handle/20.500.12860/24843Increased carbon nanotube density after catalyst generation from cobalt disilicide using a cyclic reactive ion etching approachJournal articlehttp://scitation.aip.org/content/aip/journal/jap/115/14/10.1063/1.4870949