System optimization methodology for integrated piezoelectric MEMS resonator biochemical sensors

Sieben-Xu, LingLingSieben-XuPettine, JuliaJuliaPettinePetrescu, VioletaVioletaPetrescuVandecasteele, MarianneMarianneVandecasteeleKarabacak, DevrezDevrezKarabacak2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21507System optimization methodology for integrated piezoelectric MEMS resonator biochemical sensorsProceedings paper