Interpretation of Cu/SOG stress induced voiding using stress measurements performed with synchrotron radiation

Wilson, ChrisChrisWilsonCroes, KristofKristofCroesAblett, JamesJamesAblettLofrano, MelinaMelinaLofranoBeyer, GeraldGeraldBeyerTokei, ZsoltZsoltTokei2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/20149Interpretation of Cu/SOG stress induced voiding using stress measurements performed with synchrotron radiationOral presentation