Stable patterned electrets for MEMS based energy harvesters

Van Bavel, MiekeMiekeVan BavelLeonov, VladimirVladimirLeonovvan Schaijk, RobRobvan Schaijk2021-10-182021-10-182010-09?https://imec-publications.be/handle/20.500.12860/18150Stable patterned electrets for MEMS based energy harvestersJournal articlehttp://www.memsinvestorjournal.com/2010/09/stable-patterned-electrets-for-mems-based-energy-harvesters.html