Wet clean transfer challenges in 22 nm ? pitch and 16 nm ? pitch structures

Kesters, ElsElsKestersLe, Quoc ToanQuoc ToanLeLorant, ChristopheChristopheLorantHolsteyns, FrankFrankHolsteyns2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28661Wet clean transfer challenges in 22 nm ? pitch and 16 nm ? pitch structuresProceedings paperhttps://spcc2017.com/wp-content/uploads/2017/03/01-03-Kesters-imec-Wet_clean_challenges_in_22-16nm_%C2%BD_pitch_final.pdf