RBS applied to 3D nanostructures

Claessens, NielsNielsClaessensCouture, PierrePierreCoutureEngland, JonathanJonathanEnglandDelabie, AnneliesAnneliesDelabieBogdanowicz, JanuszJanuszBogdanowiczVantomme, AndreAndreVantommeVandervorst, WilfriedWilfriedVandervorstMeersschaut, JohanJohanMeersschaut2022-12-012022-06-132022-06-292022-12-012022https://imec-publications.be/handle/20.500.12860/39948RBS applied to 3D nanostructuresOral presentationApplied physics