Fleischmann, ClaudiaClaudiaFleischmannCuduvally, RamyaRamyaCuduvallyMorris, RichardRichardMorrisMelkonyan, DavitDavitMelkonyanOp de Beeck, JonathanJonathanOp de BeeckMakhotkin, IgorIgorMakhotkinvan der Heide, PaulPaulvan der HeideVandervorst, WilfriedWilfriedVandervorst2021-10-272021-10-2720191431-9276https://imec-publications.be/handle/20.500.12860/32969Opportunities and challenges in APT metrology for semiconductor applicationsJournal articlehttps://doi.org/10.1017/S1431927619002290