Kim, Tae-GonTae-GonKimRyu, Heon-YulHeon-YulRyuKenis, KarineKarineKenisJo, Ah-jinAh-jinJoCho, Sang-JoonSang-JoonChoPark, Sang-ilSang-ilParkSchmidt, SebastianSebastianSchmidtIrmer, BerndBerndIrmer2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26833Atomic resolution quality control for Fin oxide recess by atomic resolution profilerProceedings paperhttp://zh.scientific.net/SSP.255.304