Thiam, ArameArameThiamPaolillo, SaraSaraPaolilloLazzarino, FredericFredericLazzarinoErcken, MoniqueMoniqueErckenWong, PatrickPatrickWongCharley, Anne-LaureAnne-LaureCharley2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34115Exploring resist options for EUV layers of IMEC N5 CMOS vehicleProceedings paperhttp://imnc.jp/MNC2019program08.pdf