Tilmans, HarrieHarrieTilmansZiad, HocineHocineZiadJansen, HenriHenriJansenDi Monaco, OrsolaOrsolaDi MonacoJourdain, AnneAnneJourdainDe Raedt, WalterWalterDe RaedtRottenberg, XavierXavierRottenbergDe Backer, E.E.De BackerDe Caussemaeker, AnnAnnDe CaussemaekerBaert, KrisKrisBaert2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5712Wafer-level packaged RF-MEMS switches fabricated in a CMOS fabProceedings paper