Oxygen chemiluminescence in a He plasma as a method for plasma damage evaluation of low-k dielectrics

Urbanowicz, AdamAdamUrbanowiczBaklanov, MikhaïlMikhaïlBaklanovShamiryan, DenisDenisShamiryanSoberon, FelipeFelipeSoberonDaniels, StephenStephenDanielsDe Gendt, StefanStefanDe Gendt2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14586Oxygen chemiluminescence in a He plasma as a method for plasma damage evaluation of low-k dielectricsMeeting abstract