Development of high-chi directed self-assembly process based on key learning from PS-b-PMMA system

Suh, Hyo SeonHyo SeonSuhMannaert, GeertGeertMannaertVandenbroeck, NadiaNadiaVandenbroeckDoise, JanJanDoise2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/37216Development of high-chi directed self-assembly process based on key learning from PS-b-PMMA systemProceedings paperhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11612/116120P/Development-of-high-chi-directed-self-assembly-process-based-on/10.1117/12.2585169.short?SSO=1