Wu, ChenChenWuDecoster, StefanStefanDecosterRenaud, VincentVincentRenaudHermans, YannickYannickHermansMarien, PhilippePhilippeMarienMarti, GiulioGiulioMartiHeylen, NancyNancyHeylenKenens, BartBartKenensRoy, SyamashreeSyamashreeRoyUlu Okudur, FulyaFulyaUlu OkudurLe, Quoc ToanQuoc ToanLeReddy, NaveenNaveenReddySepulveda Marquez, AlfonsoAlfonsoSepulveda MarquezDelie, GillesGillesDelieGupta, AnshulAnshulGuptaLesniewska, AlicjaAlicjaLesniewskaMurdoch, GayleGayleMurdochPark, SeonghoSeonghoParkTokei, ZsoltZsoltTokei2025-08-052025-03-062025-08-052024979-8-3503-8518-22380-632XWOS:001411360600003https://imec-publications.be/handle/20.500.12860/45320Demonstration of MP18-26nm Ru Semi-Damascene Spacer-is-Dielectric SADP IntegrationProceedings paper10.1109/IITC61274.2024.10732062979-8-3503-8517-5WOS:001411360600003