Abnormal VTH/VFB shift caused by as-grown mobile charges in Al2O3 and its impacts on Flash memory cell operations

Tang, BaojunBaojunTangZhang, WeidongWeidongZhangZhang, JianfuJianfuZhangVan den Bosch, GeertGeertVan den BoschGovoreanu, BogdanBogdanGovoreanuVan Houdt, JanJanVan Houdt2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19866Abnormal VTH/VFB shift caused by as-grown mobile charges in Al2O3 and its impacts on Flash memory cell operationsProceedings paper