Photoresist absorption measurement at extreme ultraviolet (EUV) wavelength by thin film transmission method

Vesters, YannickYannickVestersShehzad, AtifAtifShehzadDe Simone, DaniloDaniloDe SimonePollentier, IvanIvanPollentierNannarone, StefanoStefanoNannaroneVandenberghe, GeertGeertVandenbergheDe Gendt, StefanStefanDe Gendt2021-10-272021-10-2720190914-9244https://imec-publications.be/handle/20.500.12860/34390Photoresist absorption measurement at extreme ultraviolet (EUV) wavelength by thin film transmission methodJournal articlehttps://doi.org/10.2494/photopolymer.32.57