Characterization and process integration of a low-k spin-on dielectric

Ballantyne, CatherineCatherineBallantyneForester, LynnLynnForesterWaeterloos, JoostJoostWaeterloos2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1074Characterization and process integration of a low-k spin-on dielectricOral presentation