Miniaturized laser Doppler vibrometers integrated in silicon-on-insulator with thermo-optic serrodyne optical frequency shifter

Li, YanLuYanLuLiVerstuyft, StevenStevenVerstuyftYurtsever, GunayGunayYurtseverKeyvaninia, ShahramShahramKeyvaniniaRoelkens, GuntherGuntherRoelkensVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21017Miniaturized laser Doppler vibrometers integrated in silicon-on-insulator with thermo-optic serrodyne optical frequency shifterProceedings paper