Chery, EmmanuelEmmanuelCheryBrady-Boyd, AnitaAnitaBrady-BoydLin, YuyuanYuyuanLinGrimes, MichaelMichaelGrimesSpringer, DavidDavidSpringerSlabbekoorn, JohnJohnSlabbekoornWalsby, EdwardEdwardWalsbyCroes, KristofKristofCroesBeyne, EricEricBeyne2022-11-082022-10-212022-11-082022-10-150167-9317https://imec-publications.be/handle/20.500.12860/40602Vapor deposited thin organic-inorganic capping layers preventing copper line oxidation in polymer-based RDL technologiesJournal articlehttps://doi.org/10.1016/j.mee.2022.111896Materials scienceCapping layerAtomic layer-depositedCopper oxidationRDL technology