A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches

van Spengen, MerlijnMerlijnvan SpengenPuers, BobBobPuersMertens, RobertRobertMertensDe Wolf, IngridIngridDe Wolf2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9795A comprehensive model to predict the charging and reliability of capacitive RF MEMS switchesJournal article