Oxide CMP as a test vehicle for defectivity during CMP with composite polymer core – silica shell abrasives designed for scratch reduction during Cu CMP

Armini, SilviaSilviaArminiMoinpour, MansourMansourMoinpourWhelan, CarolineCarolineWhelanMaex, KarenKarenMaexHernandez, Jose LuisJose LuisHernandez2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11655Oxide CMP as a test vehicle for defectivity during CMP with composite polymer core – silica shell abrasives designed for scratch reduction during Cu CMPProceedings paper