Understanding RLS limitations for EUV pre-production stages ; impact of resist dissolution

Fonseca, CarlosCarlosFonsecaShite, HideoHideoShiteHead, BrianBrianHeadNafus, KathleenKathleenNafusGronheid, RoelRoelGronheidWinroth, GustafGustafWinroth2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17109Understanding RLS limitations for EUV pre-production stages ; impact of resist dissolutionProceedings paper