Novel 2D+ model for the impact of the dielectric charge distribution on the electrostatic actuation of RF MEMS devices

Rottenberg, XavierXavierRottenbergNauwelaers, BartBartNauwelaersDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmans2021-10-152021-10-152004-07https://imec-publications.be/handle/20.500.12860/9534Novel 2D+ model for the impact of the dielectric charge distribution on the electrostatic actuation of RF MEMS devicesProceedings paper