Extended defects formation in Si crystals by clustering of intrinsic point defects studied by in-situ electron irradiation in a HREM

Fedina, L.L.FedinaGutakovskii, A.A.GutakovskiiAseev, A.A.AseevVan Landuyt, J.J.Van LanduytVanhellemont, JanJanVanhellemont2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3456Extended defects formation in Si crystals by clustering of intrinsic point defects studied by in-situ electron irradiation in a HREMJournal article