Tseng, PeterPeterTsengvan Dorp, DennisDennisvan DorpLieten, RubenRubenLietenMehta, BharatBharatMehtaVereecken, PhilippePhilippeVereeckenBorghs, GustaafGustaafBorghs2021-10-212021-10-2120132162-8734https://imec-publications.be/handle/20.500.12860/23193Enhanced photocatalytic activity of nanoroughened GaN by dry etchingJournal articlehttp://eel.ecsdl.org/content/2/11/H51.abstract